流量控制器

外部压电阀的精确控制，满量程（TEOS等效值）为6.4 g\/min，此热液流量控制器（LFC）设计用于MSP‘PE’系列涡轮汽化器。U201A系列压电式液体流量控制阀由U201A系列的液体流量传感器和温度传感器组成。2940的特点是响应时间快，这使得它是在ALD或短脉冲CVD中经常使用的短时间蒸汽脉冲的好选择。2940具有分区‘PID’设置和改进控制的自学习功能。，型号2940液体流量控制器FC2全刻度TEOS Equiv（g\/min）32全刻度去离子水（g\/min）5.0耐压（bar）1最大压降（mbar）1柱内径（mm）1.8电源@24V（W）48端口连接器1\/8英寸外螺纹VCR配件工作温度（ºC）0–50工作湿度（%）20–80非冷凝材料石英玻璃\/PEEK\/SS316\/Viton\/Silicon RTV尺寸（mm\/inches）127 x 152 x 25\/5 x 6 x 1重量（kg\/lb）0.45\/1.0最佳存储温度（ºC）-10–60安装槽四个0.15英寸宽的插槽在4.75英寸x 0.75英寸模式上通信引脚输入功能1+24V2设定点（0–5V）3监视器（0–5V）4 RXD5 TXD6,7,8,9接地

Besides the standard gas flow sensor solutions, Sensirion also offers customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow controllers according to your specific requirements.","Developing your product, we rely on our unique and patented CMOSens® Technology. This technology allows for integrating the highly precise sensor element as well as the electronics for signal processing on one single tiny chip. Correspondingly, gas flow sensor solutions based on CMOSens® set new standards for precision, reliability, functionality and cost effectiveness.","During the development process, you can rely on Sensirion's highly qualified project teams. Thanks to our committed and competent employees you always benefit from fast and effective technical Support.