外部压电阀的精确控制，满量程（TEOS等效值）为580 mg\/min，此热液流量控制器（LFC）设计用于MSP‘PE’系列涡轮汽化器。2940 LFC由一个热传感器组成，用于感测液体的质量流量，并产生电压来操作‘PE’系列涡轮汽化器中的压电控制阀。  2940的特点是响应时间快，是经常用于ALD或短脉冲的短时间蒸汽脉冲的好选择CVD.  2940具有分区‘PID’设置和改进控制的自学习功能。，2940型液体流量控制器FC1全标度TEOS Equiv（g\/min）0.58全标度去离子水（g\/min）0.08耐压（bar）5最大压降（mbar）5柱内径（mm）0.48功率@24V（W）48端口连接器1\/8英寸外螺纹CVR配件工作温度（ºC）0–50工作湿度（%）20–80非冷凝密封材料石英玻璃\/PEEK\/SS316\/Viton\/Silicon RTV尺寸（mm\/incjes）127 x 152 x 25\/5 x 6 x 1重量（kg\/lb）0.45\/1.0存储温度（ºC）-10–60安装插槽四4.75英寸x 0.75英寸图案上0.15英寸宽的插槽通信PinoutPin功能1+24V2设定点（0–5V）3监视器（0–5V）4 RXD5 TXD6,7,8,9地线

Besides the standard gas flow sensor solutions, Sensirion also offers customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow controllers according to your specific requirements.","Developing your product, we rely on our unique and patented CMOSens® Technology. This technology allows for integrating the highly precise sensor element as well as the electronics for signal processing on one single tiny chip. Correspondingly, gas flow sensor solutions based on CMOSens® set new standards for precision, reliability, functionality and cost effectiveness.","During the development process, you can rely on Sensirion's highly qualified project teams. Thanks to our committed and competent employees you always benefit from fast and effective technical Support.