Kionix / ROHM Semiconductor KXR94-2283 地震仪器

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  • KXR94-2283

  • 地震仪器

  • Kionix / ROHM Semiconductor

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  • Kionix / ROHM Semiconductor

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These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes, and is protected from the environment by a hermetically-sealed silicon cap at the wafer level. The KXR94 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 2.5V and 5.25V. Sensitivity is factory programmable allowing customization for applications requiring from ±1.0g to ±5.0g ranges. Sensor bandwidth is user-definable. The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. This voltage is digitized by an on-board A\/D converter and is accessed via serial peripheral interface (SPI). The sense element design utilizes common mode cancellation to decrease errors from process variation and environmental stress.

KXR94-2283 地震仪器技术参数

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特 性
测量轴数 Single; Biaxial; Triaxial
频率范围 800 Hz
加速度范围 2 g
环 境
工作温度 -40 to 185 F (-40 to 85 C)
最大冲击 5000 g
更多技术信息
产品形式 Linear Accelerometer; Sensor / Transducer
更多规格
特征 Environmentally / Hermetically Sealed; Self Test / Self Calibrating
产品类别 Seismic Instruments

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