产品介绍
These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes, and is protected from the environment by a hermetically-sealed silicon cap at the wafer level. The KXR94 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 2.5V and 5.25V. Sensitivity is factory programmable allowing customization for applications requiring from ±1.0g to ±5.0g ranges. Sensor bandwidth is user-definable. The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. This voltage is digitized by an on-board A\/D converter and is accessed via serial peripheral interface (SPI). The sense element design utilizes common mode cancellation to decrease errors from process variation and environmental stress.
KXR94-2283 地震仪器技术参数
规格项 | 参数值 | 勾选搜索替代 |
特 性 | ||
测量轴数 | Single; Biaxial; Triaxial | |
频率范围 | 800 Hz | |
加速度范围 | 2 g | |
环 境 | ||
工作温度 | -40 to 185 F (-40 to 85 C) | |
最大冲击 | 5000 g | |
更多技术信息 | ||
产品形式 | Linear Accelerometer; Sensor / Transducer | |
更多规格 | ||
特征 | Environmentally / Hermetically Sealed; Self Test / Self Calibrating | |
产品类别 | Seismic Instruments |
产品替代
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