Kionix / ROHM Semiconductor KXPS5-3157 地震仪器

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  • KXPS5-3157

  • 地震仪器

  • Kionix / ROHM Semiconductor

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  • Kionix / ROHM Semiconductor

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These high-performance silicon micromachined linear accelerometersand inclinometers consist of a sensor element and an ASIC packaged in a3x5x0.9mm Land Grid Array (LGA). The sensor element is fabricated fromsingle-crystal silicon with proprietary Deep Reactive Ion Etching(DRIE) processes and is protected from the environment by ahermetically-sealed silicon cap at the wafer level.\tTheKXPS5 series is designed to provide a high signal-to-noise ratio withexcellent performance over temperature. These sensors can accept supplyvoltages between 1.8V and 5.25V. Sensitivity is factory programmableallowing customization for applications requiring from ±1.5g to ±6.0granges. Sensor bandwidth is user-definable. Interrupts can be generatedfor acceleration on any axis above a threshold value (Motion Interrupt)or for acceleration on all three axes below a threshold value(Free-fall Interrupt).\tThe sensor element functions onthe principle of differential capacitance. Acceleration causesdisplacement of a silicon structure resulting in a change incapacitance. An ASIC, using a standard CMOS manufacturing process,detects and transforms changes in capacitance into an analog outputvoltage, which is proportional to acceleration. This voltage isdigitized by an on-board A\/D converter and is accessed via aninter-integrated circuit (I2C) bus or serial peripheral interface (SPI).

KXPS5-3157 地震仪器技术参数

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特 性
测量轴数 Single; Biaxial; Triaxial
频率范围 1000 Hz
加速度范围 3 g
环 境
工作温度 -40 to 185 F (-40 to 85 C)
最大冲击 5000 g
更多技术信息
产品形式 Linear Accelerometer; Sensor / Transducer
更多规格
特征 Environmentally / Hermetically Sealed; Self Test / Self Calibrating
产品类别 Seismic Instruments

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