Siargo Ltd. MF5003 质量流量计和控制器

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  • MF5003

  • 质量流量计和控制器

  • Siargo 矽翔微机电

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  • Siargo 矽翔微机电

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MF5000 series mass flow meters are specially designed for small pipe flow monitor and control. This series can measure gas flow in a pipe diameter as small as 0.5 mm, but not over 19 mm. Thanks to the self-flow conditioning feature of the MEMS sensors, the meters features an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally (1.5+0.2FS%) or better depending on the requests. The meters can work at an environment of -20 to 60°C and pressure up to 2.5 MPa. Applications include semiconductor gas process monitor and control, hospital oxygen gas monitor, etc.

MF5003 质量流量计和控制器技术参数

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性 能
精度 1.5 ±%
特 性
工作压力 435 psi (306 m H2O)
介质类型 Gas
连 接 & 显 示
接口选项 Serial / Digital
环 境
工作温度 -4 to 149 F (-20 to 65 C)
物 理
终端配件 In-line Threaded
管道直径 0.12 inch (3 mm)
安装 In-line
更多技术信息
仪表形式 Mass Flow Meter
更多规格
显示 Digital
产品类别 Mass Flow Meters and Controllers
测量技术 MEMS Flow Sensor

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